WebbCu films prepared by bipolar pulsed high power impulse magnetron sputtering Baohua Wu a, b, Ian Haehnlein a, c, Ivan Shchelkanov a, Jake McLain c, Dhruval Patel a, Jan Uhlig a, Brian Jurczyk c, Yongxiang Leng b, David N. Ruzic a, * a Department of Nuclear, Plasma, and Radiological Engineering, University of Illinois at Urbana-Champaign, IL … WebbHigh power impulse magnetrons sputtering (HIPIMS) is a novel ionized physical vapor deposition technique in which high power pulses with low duty cycle are applied to a …
Novel high power impulse magnetron sputtering enhanced by an …
Webb1 aug. 2024 · High-power impulse magnetron sputtering (HiPIMS) is rather a new and rapidly developing method for physical vapor deposition of thin films. Due to a high … WebbAn efficient water cooling ensures highest reliability even in non-air-conditioned rooms. In order to avoid condensation water, an external magnetic valve can be connected via the integrated temperature control. The output power can be increased up to 280 kW in parallel operation. h9 corporation\\u0027s
HiPIMS + DC - MELEC GmbH
Webbwww.shu.ac.uk/hipims HIPIMS Technology . High power impulse magnetron sputtering (HIPIMS) is a revolutionary magnetron sputtering technology used for surface pre … WebbThe cathode and power supply were installed in an industrial size batch coater Hauzer HTC 1000/4 (chamber volume of 1 m 3), replacing one of the four original cathodes of … WebbThe C magnetron cathode was powered by a home-made HiPIMS power supply, providing stable voltage level throughout the pulse duration and operating at a frequency of 500 Hz and 30 µs pulse duration for all the experiments. The peak current was maintained at 25 A by adjusting the discharge voltage. bradford city fa cup